Thin film materials technology: Sputtering of compound materials / K. Wasa, M. Kitabatake, H. Adachi. — Norwich: William Andrew, 2004. — 518 с.: ill. — (Related electronic materials and process technology). — Bibliogr. at the end of the chapters. — Ind.: p. 501-518. — ISBN 3-540-21118-7: 5680.00 р.